11:15am - 11:45amID: 186
/ SESSION 2: 1
Type of Contribution: Oral
Topics: EXMATEC: WBG and UWBG material: Growth and CharacterizationKeywords: GaN, Crystal Growth
Shaping the Future of GaN Crystal Growth Technology
Michał Boćkowski
Institute of High Pressure Physics Polish Academy of Sciences,, Poland
This lecture provides a comprehensive overview of bulk GaN crystallization,
tracing its evolution, key milestones, recent advancements, and future
prospects. Various growth techniques will be examined, including halide
vapor phase epitaxy (HVPE) and the ammonothermal method, the latter
being the most promising. A comparative analysis of acidic and basic
ammonothermal growth will highlight their advantages, limitations, and
technological challenges. The integration of ammonothermal and HVPE
technologies presents significant potential for further advancements.
However, scaling GaN crystal growth for commercial applications remains
a critical challenge. This lecture will explore current progress and realistic
development timelines. Additionally, the transition from bulk crystal
growth to usable substrates requires precise processing techniques, such
as wafer cutting and surface treatment. The discussion will conclude with
key applications of GaN substrates in optoelectronic and electronic devices.
11:45am - 12:00pmID: 137
/ SESSION 2: 2
Type of Contribution: Oral
Topics: EXMATEC: WBG and UWBG material: Growth and CharacterizationKeywords: X-ray Diffraction, InGaN Quantum Wells
In-situ observation of the homogenization and decomposition of the InGaN Quantum Wells
Mike Leszczynski1, Ewa Grzanka1, Artur Lachowski1, Szymon Grzanka1, Robert Czernecki1, Sondes Bauer2, Tilo Baumbach2
1Institute of High Pressure Physics, Poland; 2Karlsruhe Institute of Technology, Germany
InGaN Multiple Quantum Wells (MQWs) were examined in situ during annealing in the KARA synchrotron. The high brightness of the X-ray beam enabled us to measure the reciprocal space maps fast enough to monitor the changes in the InGaN lattice. At moderate temperatures, we observed homogenization of the QWs. At temperatures close to 1000oC, the wells got decomposed. Still, this phenomenon depended not only on In-content in InGaN and temperature but also on the microstructure (defect density) layers below the QWs.
12:00pm - 12:15pmID: 141
/ SESSION 2: 3
Type of Contribution: Oral
Topics: WOCSDICE: Other semiconductor devicesKeywords: SiliconCarbide, Q-factor, COMSOL, Cantilever double clamped
Numerical and analytical models for (111) 3C-SiC double clamped beams
Annamaria Muoio1, Angela Garofalo1,2, Saverio De Luca1, Sergio Sapienza3, Matteo Ferri3, Luca Belsito3, Alberto Roncaglia3, Francesco La Via1
1CNR-IMM Catania, Italy; 2Material Science Department University Milano-Bicocca, Italy; 3CNR-ISMN Bologna, Italy
This work aims to find a correlation between the high-value Young’s modulus of silicon carbide and the high frequencies and quality (Q) factors in resonant devices built with 3C-SiC Double-Clamped (DC) beams grown on (111) silicon substrates. The study is important for understanding the sensitivity of the device’s eigenfrequencies with respect to variations in length and thickness. We aim to verify if our data[1], along with results from the literature, confirm the Quality factor model proposed by Romero et al. [2], extending the range of film thickness to about 1 µm.
12:15pm - 12:30pmID: 132
/ SESSION 2: 4
Type of Contribution: Oral
Topics: EXMATEC: WBG and UWBG material: Growth and CharacterizationKeywords: Silicon Carbide, post deposition annealing, exciton, lifetime, oxygen
Effects on 4H-SiC of thermal annealing at high pressure of Oxygen or Helium
Gianmarco Laurella1, Francesca Migliore1, Marco Cannas1, Franco Gelardi1, Corrado Coccorese2, Massimo Boscaglia2, Massimo Davide Pirnaci2, Simonpietro Agnello3
1Department of Physics and Chemistry, University of Palermo, Palermo (Italy); 2STMicroelectronics, Catania (Italy); 3AtenCenter, University of Palermo, Palermo (Italy)
Thermal annealing plays a crucial role in the optimization of 4H-SiC electronic devices, particularly in passivating interface defects. In this work, we investigate the effects of high-pressure (800 PSI) thermal annealing in Oxygen and Helium atmospheres of 4H-SiC at 400 °C by studying the exciton lifetime. We studied three different wafer types representing different stages of the fabrication process: a bare epitaxial layer A(epi), an oxide-covered sample B(epi+ox), and a sample subjected to post-deposition annealing in NO C(epi+ox+NO). Photoluminescence decay measurements reveal a significant decrease in exciton lifetime for the bare epitaxial sample after annealing, while the oxide-covered sample exhibits an increase in lifetime in oxygen-rich conditions. Comparisons with helium treatments highlight the role of oxygen in defects passivation, suggesting that O₂-based annealing could be a cost-effective alternative to NO treatments.
12:30pm - 12:45pmID: 113
/ SESSION 2: 5
Type of Contribution: Oral
Topics: EXMATEC: WBG and UWBG material: Growth and Characterization, EXMATEC: Nanostructures, EXMATEC: Structural characterizationKeywords: β-Ga2O3, ion implantation, microtubes, nanomembranes
Strain Engineering for β-Ga2O3 Nanostructures: Ion-beam-exfoliated Microtubes & Nanomembranes
Duarte Magalhães Esteves1,2, Ru He3, Calliope Bazioti4, Sérgio Magalhães2,5, Miguel Carvalho Sequeira6, Luís Filipe Santos7, Alexander Azarov4, Andrej Kuznetsov4, Flyura Djurabekova3, Katharina Lorenz1,2,5, Marco Peres1,2,5
1INESC MN, Lisbon, Portugal; 2IPFN, Instituto Superior Técnico, University of Lisbon, Portugal; 3Department of Physics, University of Helsinki, Finland; 4Department of Physics and Centre for Materials Science and Nanotechnology, University of Oslo, Norway; 5Department of Nuclear Sciences and Engineering, Instituto Superior Técnico, University of Lisbon, Portugal; 6Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany; 7Centre for Structural Chemistry, Institute of Molecular Sciences and Department of Chemical Engineering, Instituto Superior Técnico, University of Lisbon, Portugal
This study presents an innovative approach for fabricating monoclinic gallium oxide (β-Ga2O3) microtubes and nanomembranes by ion-beam-induced exfoliation. Using Cr ion implantation as a case-study, the evolution of the defects, strain and stress profiles are assessed by a combination of X-ray Diffraction, Rutherford Backscattering Spectrometry in Channelling mode and Molecular Dynamics. The developed strain engineering method is shown to lead to a self-rolling of the surface layers of (100)-oriented single-crystals, yielding microtubes. A subsequent thermal annealing leads to strain relaxation, and these structures unroll, forming nanomembranes with bulk-like crystalline quality. This novel technique has the potential of becoming a scalable and reproducible method compared to conventional exfoliation techniques, while also enabling the simultaneous doping of the membranes, which can be customised in terms of their optical, electrical, and magnetic properties. This work thus contributes to better understand the elastic properties of this material under ion irradiation, as well as enhanced its potential for applications in power electronics, photonics, and sensors.
|