Conference Agenda

Konstantinos Zekentes
Biosensors and neural interfaces are intensively investigated the last decades. Silicon, although the main material for fabricating this type of devices, suffers from both the lack of long-term chemical stability in physiological environments and the low biocompatibility. Hence, replacing the silicon with another semiconducting material offering in addition to technology maturity, inherent chemical robustness, comparable electronic properties as well as biocompatibility is an absolute necessity. In this regard, silicon carbide SiC could be an alternative material in the development of bio-devices due to its superior characteristics. Biosensors and neural interfaces based on SiC are under development using SiC device fabrication technology. A review of the state-of-the-art of employed technology (ohmic contact formation, plasma etching, ion-implantation, aSiC as well as poly-SiC deposition) will be given.