Conference Agenda

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Session Overview
Session
PS-2: POSTER SESSION
Time:
Wednesday, 18/June/2025:
4:45pm - 6:00pm

Session Chair: Juan Luis Garcia-Pomar
Session Topics:
WOCSDICE: WBG and UWBG material devices, WOCSDICE: Graphene and 2D materials devices, WOCSDICE: Other semiconductor devices, WOCSDICE: Electrical and Photonics characterization, EXMATEC: WBG and UWBG material: Growth and Characterization, EXMATEC: Graphene and 2D materials, EXMATEC: Other semiconductor materials, EXMATEC: Nanostructures, WOCSDICE: Theory and Modeling, EXMATEC: Structural characterization

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Presentations
ID: 125 / PS-2: 1
Type of Contribution: Indifferent
Topics: WOCSDICE: WBG and UWBG material devices
Keywords: ScAlN, GaN, RF, SAW, Filter, HEMT

Co-Integration of High-Frequency Devices on Epitaxial ScAlN for Tunable RF SAW Filters

Nagesh Bhat1, Seif El-whibi1, Edouard Lebouvier1, Nicolas Defrance1, Jean-Claude De Jaeger1, Zahia Bougrioua1, Florian Bartoli2, Valentina Gallardo-Mödinger2, Maxime Hugues2, Yvon Cordier2, Sami Hage-Ali3, Ulrich Youbi3, Thierry Aubert3, Omar Elmazria3, Marie Lesecq1

1Univ. Lille, CNRS, Centrale Lille, Univ. Polytechnique Hauts-de-France, UMR 8520 – IEMN-Institut d’Electronique de Microélectronique et de Nanotechnologie, F-59000, Lille, France; 2Université Côte d’Azur, CNRS, CRHEA, rue B. Gregory, 06560 Valbonne, France; 3Université de Lorraine - CNRS, Institut Jean Lamour UMR 7198, Nancy,54000, France

With the rise of 6G and growing data demands, high-performance materials for RF components are essential. Scandium-doped aluminum nitride (ScAlN) offers a promising barrier layer for next-generation high electron mobility transistors (HEMTs), providing enhanced carrier density. This piezoelectric material, with high electromechanical coupling coefficients (K²), is also a strong candidate for surface acoustic wave (SAW) filtering applications, particularly in the 1-10 GHz range, due to high SAW velocities. We demonstrate the monolithic integration of ScAlN/GaN HEMTs with interdigital transducers (IDTs), highlighting the potential of this material system for high-performance RF applications.



ID: 126 / PS-2: 2
Type of Contribution: Oral
Topics: WOCSDICE: WBG and UWBG material devices, WOCSDICE: Electrical and Photonics characterization, EXMATEC: WBG and UWBG material: Growth and Characterization, EXMATEC: Nanostructures, EXMATEC: Structural characterization
Keywords: Ga₂O₃, thin films, RF sputtering, DUV photodetectors

Study of RF-sputtered Ga₂O₃ Thin Films for DUV Photodetectors

Ana Sofia Sousa1,2, Duarte M. Esteves2,3, Tiago T. Robalo4, Mário S. Rodrigues4, Luís F. Santos5, Reinhard Schwarz1,6, Katharina Lorenz1,2,3, Marco Peres1,2,3

1Instituto Superior Técnico, University of Lisbon, Portugal; 2INESC Microsystems and Nanotechnology, Lisbon, Portugal; 3IPFN, Instituto Superior Técnico, University of Lisbon, Portugal; 4Departamento de Física and BioISI – BioSystems and Integrative Sciences Institute, Faculdade de Ciências, University of Lisbon, Portugal; 5Centro de Química Estrutural, Institute of Molecular Sciences and Departamento de Engenharia Química, Instituto Superior Técnico, University of Lisbon, Portugal; 6CeFEMA, Instituto Superior Técnico, University of Lisbon, Portugal

Ga₂O₃ is a wide-bandgap semiconductor which has been steadily growing in popularity. This work focuses on RF Sputtering, which stands out among possible deposition techniques of Ga₂O₃ thin films as it combines high quality with low costs. The use of sapphire substrates and post-deposition thermal annealing promotes the crystallisation of the thin films, which are amorphous as-deposited, but also the interdiffusion of Al and Ga, which directly affects their opto-electronic properties. In particular, through the formation of an (AlₓGa₁₋ₓ)₂O₃ compound, we can tune the bandgap from 4.85 to 5.30 eV by shifting the Al₂O₃ molar fraction up to 43.8%. This is leveraged to produce metal-semiconductor-metal interdigitated solar-blind photodetector prototypes with a very fast response time and competitive responsivities. We also evaluate the potential of ion implantation for photodetectors and similar systems, namely using Sn ions.



ID: 129 / PS-2: 3
Type of Contribution: Poster
Topics: EXMATEC: WBG and UWBG material: Growth and Characterization
Keywords: Wide bang gap semiconductors, metallic nanoparticles, ion implantation, optical transmission, Rutherford backscattering spectrometry

Formation and modification of Ag and Au nanoparticles created by ion implantation in Ga2O3 thin films

Inês Freitas1,2, Ana Sofia Sousa1,2, Duarte Magalhães Esteves1,2,3, Ângelo Rafael Granadeiro da Costa1,4, Joana Madureira1,4,5, Sandra Cabo Verde1,4,5, Karla Ivanković Nizić6, Toni Dunatov6, Georgios Provatas6, Katharina Lorenz1,2,3,5, Marco Peres1,2,3,5

1Instituto Superior Técnico, University of Lisbon and INESC MN, Portugal; 2INESC MN, Lisbon, Portugal; 3IPFN, Instituto Superior Técnico, University of Lisbon, Portugal; 4C2TN, Instituto Superior Técnico, University of Lisbon, Portugal; 5DECN, Instituto Superior Técnico, University of Lisbon, Portugal; 6Division of Experimental Physics, Ruđer Bošković Institute, Bijenička cesta 54, Zagreb, Croatia

The combined properties of wide band gap semiconductors and metallic nanoparticles have captured the interest of many in the scientific community due to their vast potential for device applications.

This study probes the formation of Ag and Au nanoparticles in RF-sputtered Ga₂O₃ thin films, implanted with various fluences of Ag and Au ions and submitted to thermal treatment at different temperatures. Optical transmission measurements revealed absorption bands at 400–600 nm and 500–700 nm, corresponding to the localized surface plasmon resonance (LSPR) of Ag and Au nanoparticles, respectively, as well as a significant red-shift of the bands with the increase of the annealing temperature.

Additionally, the impact of heavy ion irradiation on Ag and Au ion distributions was analyzed. The implanted Ga₂O₃ films on sapphire were irradiated with Si, Cu, and I ions and, simultaneously, characterized with Rutherford backscattering spectrometry (RBS). RBS analysis showed that I irradiation led to peak broadening to higher energies, indicating ion redistribution towards the surface. Optical transmission measurements exposed a red-shift of the Ag LSPR peak in the as-implanted samples and a blue-shift in the annealed sample.



ID: 133 / PS-2: 4
Type of Contribution: Poster
Topics: EXMATEC: WBG and UWBG material: Growth and Characterization
Keywords: irradiation, diffration, absortion

Swift Heavy Ion irradiation of GaN and AlGaN Semiconductors

Belarmino Tavares1,2, Duarte Esteves1,2, Katharina Lorenz1,2,3, Marco Peres1,2,3, Sérgio Magalhães2,3, Miguel Sequeira3,4, Isabelle Monnet5, Clara Grygiel5, Florent Moisy5, Mamour Sall5

1INESC MN, Lisboa, 1000-029 Portugal; 2Instituto Superior Técnico, University of Lisbon, Lisboa, Portugal; 3IPFN, Instituto Superior Técnico, University of Lisbon , Campus Tecnológico e Nuclear, Lisboa, Portugal; 4Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Germany; 5CIMAP (CEA, CNRS, ENSICAEN, UCN), Caen, France

This study investigates the effects of 0.9 GeV Uranium-238 Swift Heavy Ion (SHI) irradiation on AlxGa1-xN thin films (with x between 0 and 1). High-resolution X-ray diffraction (HRXRD) revealed the formation of lattice strain in the irradiated samples which was considerably larger in GaN than in Al-containing compounds. Furthermore, irradiation in GaN induces a prominent optical absorption band in the visible region. Conversely, in AlₓGa₁₋ₓN samples with x = 0.18 and 0.77, although an increase in optical absorption is observed in the same spectral region, this enhancement is significantly lower than that seen in GaN. Notably, the AlN sample behaves differently from AlGaN samples, displaying the emergence of an absorption band centred at approximately 4.73 eV.



ID: 142 / PS-2: 5
Type of Contribution: Oral
Topics: WOCSDICE: WBG and UWBG material devices
Keywords: GaN diode, detector, imaging, proton

Proton beam imaging using GaN detector array

Maxime Hugues1, Matilde Siviero1, Lucas Lesourd1, Nicolas Couret1, Eric Frayssinet1, Shirley Prado De La Cruz1, Sébastien Chenot1, Marie Vidal2, Petter Hofverberg2, Joël Hérault2, Nico Brosda3, Andreas Wieck3, Stephane Higueret4, Jean-Yves Duboz1

1Université Côte d’Azur, CNRS-CRHEA; 2Institut Méditerranéen de ProtonThérapie – Centre Antoine Lacassagne; 3Lehrstuhl für Angewandte Festkörperphysik, Ruhr-Universität Bochum; 4IPHC-CNRS

This work gives an overview of the performances of GaN p-i-n and Schottky structures used for proton detection. Their ability to efficiently and accurately monitor proton beam profile have been demonstrated. In addition, first 2D image of the proton beam shape has been obtained. These results represent a significant step toward the use of GaN detector array for the daily beam quality assurance routine mandatory by proton therapy.



ID: 155 / PS-2: 6
Type of Contribution: Poster
Topics: EXMATEC: WBG and UWBG material: Growth and Characterization
Keywords: Schottky diodes, Atomic force microscopy, Schottky barriers, Kelvin probe force microscopy

Multiscale characterization of silicon carbide (4H-SiC) after sulfurization treatments

Fabrizio Roccaforte1, Salvatore Ethan Panasci1, Marilena Vivona1, Giuseppe Greco1, Patrick Fiorenza1, Attila Sulyok2, Antal Koos2, Béla Pècz2, Filippo Giannazzo1

1Consiglio Nazionale delle Ricerche – Istituto per la Microelettronica e Microsistemi (CNR-IMM), Z.I. VIII Strada 5, 95121 Catania, Italy; 2HUN-REN Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary

The effect of a sulfurization treatment carried out at 800 °C on silicon carbide (4H-SiC) surface was studied by detailed chemical, morphological, and electrical analyses. X-ray photoelectron spectroscopy confirmed sulfur (S) incorporation in the 4H-SiC surface at 800 °C, while atomic force microscopy showed that 4H-SiC surface topography is not affected by this process. The electrical characterization of Ni/4H-SiC Schottky contacts fabricated on sulfurized 4H-SiC surfaces revealed a significant reduction (∼0.3 eV) and a narrower distribution of the average Schottky barrier height with respect to the reference untreated sample. This effect was explained in terms of a Fermi level pinning effect induced by surface S incorporation. In fact, an increase in the 4H-SiC electron affinity was revealed by Kelvin Probe Force Microscopy in the sulfurized sample with respect to the untreated surface to corroborate this hypothesis.



ID: 157 / PS-2: 7
Type of Contribution: Poster
Topics: EXMATEC: Graphene and 2D materials
Keywords: MoS2, WS2, MoxW1-xS2 ternary compounds, sulfurization, photoluminescence

Scalable growth of optically uniform MoWS2 alloys by sulfurization of ultrathin Mo/W films

Salvatore Ethan Panasci1, Emanuela Schilirò1, Antal Koos2, Tayfun Kutlu3, Hasan Sahin3, Fabrizio Roccaforte1, Béla Pècz2, Filippo Giannazzo1

1Consiglio Nazionale delle Ricerche – Istituto per la Microelettronica e Microsistemi (CNR-IMM), Z.I. VIII Strada 5, 95121 Catania, Italy; 2HUN-REN Centre for Energy Research, Institute of Technical Physics and Materials Science, Konkoly-Thege ut 29-33, 1121 Budapest, Hungary; 3Department of Photonics Izmir Institute of Technology, 35430 Izmir, Turkiye

Two-dimensional (2D) transition metal dichalcogenides (TMDs) ternary alloys, such as MoxW1-xS2, are very appealing for the possibility of continuously tuning their excitonic bandgap by the composition. In this work, we demonstrated the growth of highly uniform Mo0.5W0.5S2 bi-layers on cm2 size SiO2/Si substrates by employing a simple and scalable approach, i.e. the sulfurization of a pre-deposited ultra-thin Mo/W stack at a temperature of 700°C. Comparison of Mo(1.2 nm)/SiO2, W(1.2 nm)/SiO2, and Mo(1.2 nm)/W(1.2 nm)/SiO2 samples after identical sulfurization conditions revealed very different results, i.e. (i) a uniform monolayer (1L) MoS2 film, (ii) separated multilayer WS2 islands, and (iii) a uniform bilayer (2L) Mo0.5W0.5S2 film. This indicates how W surface diffusion and coalescence on SiO2 surface plays a main role in WS2 islands formation, whereas the reaction between S vapour with Mo films or Mo/W stacks represents the dominant mechanism for the formation of MoS2 and the MoWS2 alloy. Micro-photoluminescence (PL) mapping of the obtained 2L-Mo0.5W0.5S2 film showed an excellent uniformity of light emission on large area with an exciton peak at 1.97 eV, significantly blue-shifted with respect to PL emission of 1L-MoS2 at 1.86 eV. Such highly uniform optical properties make the grown MoWS2 alloy very promising for optoelectronic applications.



ID: 160 / PS-2: 8
Type of Contribution: Oral
Topics: WOCSDICE: WBG and UWBG material devices, EXMATEC: WBG and UWBG material: Growth and Characterization
Keywords: Ohmic, Contacts, FIB, n-type, diamond

Ohmic contacts on phosphorus-doped diamond fabricated by FIB transformation and surface Ga+ implantation

Gabriel Mesas Peña1, Fernando Lloret1,2, Antonio Freire de Rivas1, Josué Millán-Barba2,3, Gonzalo Alba1,2, Mariko Suzuki4, M. Pilar Villar Villar2,3, Daniel Araujo2,3

1Department of Applied Physics, University of Cádiz, 11510 Puerto Real, Spain; 2IMEYMAT, University of Cádiz, 11510 Puerto Real, Spain; 3Department of Material Science, University of Cádiz, 11510 Puerto Real, Spain; 4Orbray Co., Ltd., 3-8-22 Shinden, Adachi-ku, Tokyo, 123-8511 Japan.

Electric contacts made on an n-type diamond layer through FIB structure modification have been studied. First, the characterization of a conduction channel was carried out, revealing an ohmic behaviour of the transformed area although it remains highly resistive. Then, a circular TLM was conducted on the surface of the sample. The specific contact resistivity, obtained from the cTLM (circular Transfer Length Method) analysis, is 4,42·10^4 Ωcm^2, which is comparable to traditional contacts.



ID: 194 / PS-2: 9
Type of Contribution: Poster
Topics: EXMATEC: Structural characterization
Keywords: ZnO, Thin films, Piezoelectricity, Wurtzite structure, Super lattices

Structural study of ZnOthin films obtained by plasma assisted magnetron sputtering

Isabel Maria Casal Arazola1, Michael McKinlay2, Carlos Garcia Nuñez2, Lucia Nieto Sierra1, Gonzalo Alba3,4, M.Pilar Villar1,3

1Dpto. Ciencia de los Materiales e IM y QI, Universidad de Cádiz, 11510-Puerto Real,Spain; 2MicroelectronicsLab, James Watt SchoolofEngineering, Universityof Glasgow, G12 8QQ Glasgow, UK; 3IMEYMAT, UCA, Spain; 4Dpto. Física Aplicada, Universidad de Cádiz, 11510-Puerto Real, Spain

This study utilizes transmission electron microscopy (TEM), specifically high-resolution TEM (HREM), to analyze zinc oxide (ZnO) thin films sputtered onto Si (001) substrates, with a focus on correlating their crystalline structure to the observed piezoelectric properties. Studies confirm that all the samples exhibit wurtzite (HCP) structure, with highly c-axis oriented grains. In HREM observations, predominant [2-1-10] zone axis, with a smaller and variable proportion of [0001]-oriented zone axis is found, depending on the growing parameters.It is observed that the more homogeneously [2-1-10] orientation extends, the more enhance in piezoelectric behaviour is found. Features as nonc-oriented grains or more complex crystalline structures seem to negatively affect piezoelectricity.



ID: 196 / PS-2: 10
Type of Contribution: Poster
Topics: WOCSDICE: Graphene and 2D materials devices, EXMATEC: Graphene and 2D materials, EXMATEC: Nanostructures
Keywords: Graphene powder, Atmospheric pressure plasma, multifunctional material, graphene nanocomposites, scalable synthesis

Graphene Powder Synthesized via Microwave Plasma at Atmospheric Pressure as a Multifunctional Material for Compound Semiconductor Applications

Francisco J. Morales-Calero, Antonio Cobos-Luque, Andrés M. Raya Bejarano, José Muñoz Espadero, Rocío Pérez Portero, Kevin Pareja Ruiz, Norma Y. Mendoza-González, Jorge A. Alcusón Belloso, María Dolores Calzada Canalejo, Rocío Rincón Liévana

Laboratory of Innovation in Plasmas, Universidad de Córdoba, Spain

Graphene has long been considered a paradigm-shifting material due to its outstanding electronic, thermal, and mechanical properties. However, exploiting its full potential in real-world devices remains a challenge due to limitations in synthesis methods, scalability, and material consistency. In this work, we present a scalable, single-step approach for the synthesis of high-quality, few-layer powdered graphene using microwave plasma torch at atmospheric pressure. The resulting material exhibits high quality and purity and a low defect density, maintaining high electrical conductivity and structural integrity while enabling excellent dispersibility in common solvents. The versatility of this synthesis technique is further evidenced by the one-step production of graphene-based nanocomposites such as G-TiO₂ and G-Cu. The demonstrated capabilities of the material highlight its strong potential for integration into compound semiconductor applications such as printable electronics, electromagnetic interference shielding, and functional contacts, among others.