Conference Agenda

Overview and details of the sessions of this conference. Please select a date or location to show only sessions at that day or location. Please select a single session for detailed view (with abstracts and downloads if available).

Please note that all times are shown in the time zone of the conference. The current conference time is: 2nd May 2025, 06:46:40pm CEST

 
 
Program for LiM 2025
Session
Micro: Surface patterning, thin film processing and functionalization 3
Time:
Thursday, 26/June/2025:
10:30am - 12:00pm

Location: ICM Ground Floor Room 3

Capacity: 125

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Presentations
10:30am - 10:45am

Selective laser induced metallization of dielectrics for electronic applications

Modestas Sadauskas, Šarūnas Mickus, Evaldas Kvietkauskas, Viktorija Vrubliauskaitė, Justina Žemgulytė, Paulius Ragulis, Karolis Ratautas, Romualdas Trusovas

FTMC - Fizinių ir technologijos mokslų centras, Lithuania

Internet of Things (IoT) applications demand antennas that can integrate into diverse environments. Traditional rigid antennas struggle to conform to curved surfaces, bendable devices, and wearable applications. Flexible antennas offer a compelling solution by overcoming these constraints, enabling seamless integration into various unconventional form factors.

In this work, we report the results of experiments on the application of selective surface activation induced by laser (SSAIL) technology for antenna applications. The inverted F antenna on the Polyvinylidene fluoride (PDVF) substrate was modeled using CST Studio software. The surface of (PVDF) was processed using 532 nm femtosecond laser Femtolux (Ekspla) irradiation. Later, irradiated areas were selectively coated by copper layer using surface activation and electroless plating process.

The S11 parameter of the manufactured antenna was compared to the modelling results. Measurement results were in great agreement with the simulation results. Antenna bandwidth at -10 dB was from 3.35 GHz to 3.72 GHz.



10:45am - 11:00am

UV laser nanostructuring for the selective growth of high-quality III-V semiconductor layers

Julian Hürtgen1, Serhiy Danylyuk1, Yilmaz Dikme2

1Fraunhofer Insitute for Laser Technology ILT, Germany; 2Element 3-5 GmbH, Germany

III-V semiconductors (e.g. GaN) are playing an increasingly important role in LED technology and in high-power electronics. However, the current production of these semiconductor devices requires many individual process steps, including lithographic prestructuring of growth substates, which is very cost- and energy-intensive. The targeted laser structuring of substrates in both the micro and nanometer range should enable the production of high-quality layers in isolated dies in a closed process and thus significantly reduce both costs and environmental impact.

With the help of a UV ultrashort pulsed laser, wide tracks are written on various substrates (e.g. sapphire or silicon wafers), which selectively prevent subsequent epitaxial overgrowth and thus enable bottom-up separation into individual dies. Subsequently, nanostructuring is carried out within these dies to enable the overgrowth of high-quality layers. Furthermore, the scalability of this structuring, e.g. with the help of phase masks, and the influence of different processing atmospheres is investigated.



11:00am - 11:15am

Demonstration of etch depth limitation by evanescent-light-assisted etching of n-GaAs

Kaito Miyakoda1, Hirofumi Hidai1,2, Sho Itoh1,3, Souta Matsusaka1

1Department of Mechanical Engineering, Chiba University, Japan; 2Molecular Chirality Research Center, Chiba University, Japan; 3Faculty of Engineering Technology and Science, Higher Collerges of Technology, United Arab Emirates

Photoelectrochemical (PEC) etching offers a damage-free surface and high horizontal selectivity which dissolves the light-illuminated areas. However, accurate etch-depth control is challenging due to the absence of a mechanism to limit etch depth. The evanescent light localizes the illuminating area to the vicinity of the interface under the total internal reflection. Owing to the dependence of the etch rate on the light intensity, the etch depth is expected to be restricted by the localization of evanescent light. In this presentation, we demonstrate PEC etching using evanescent light. The cavity shape reflects the distribution of evanescent light, implying a sufficient etchant supply. The time evolution of the etch depth revealed that the evanescent light distribution limited the etch depth to approximately 900 nm from the reflective interface. This evolution matches the model, stating the etch rate is proportional to light intensity. Our results lead to precise etch-depth control and damage-free planarization.



11:15am - 11:30am

Determining the electric properties and proportionality factor of digitally printed and laser-sintered strain gauges for tensile stress measurement

Samuel Moritz Fink, Martin Shulevski

Fraunhofer-Institut für Lasertechnik ILT, Germany

Integrated sensors are becoming increasingly important for structural health monitoring of components. Digitally printed and additively manufactured strain gauges can be used to evaluate the mechanical stress of materials with a greater quality factor than manually applied strain gauges.

We propose an approach that involves the application of strain gauges to tensile stress components using the ink jet-printing process with a nanoparticle silver ink. In a post-processing step, the strain gauges are laser-sintered to functionalize the material and stabilize the resistivity of the thin film. We report on the results of tensile tests with the contacted sensors and characterizing their electrical properties, as well as the proportionality factor of the strain gauges in dependence of the laser process parameters.

Our approach with contactless application and laser-based post-processing has the potential to enhance the reproducibility of the sensor application and strengthen the quality assurance.



11:30am - 11:45am

Modification mechanisms on 4HN-SiC and 6H-SiC wafers using picosecond laser ablation: a comparative study of Deep-UV and UV technologies

YIYUN KANG1, Mareike Schäfer2, Alexej Belakowski1, Fabian Soerensen1, Ralf Knappe1, Johannes L'huillier2

1Coherent Kaiserslautern GmbH, Germany; 2Institut für Oberflächen und Schichttechnik GmbH

The application fields of silicon carbide (SiC) range from high-performance electronics, power semiconductors, and batteries to use in quantum computing. Due to its outstanding properties such as very high hardness and abrasion resistance, silicon carbide is a hard-to-machine material. One possible processing method is high-precision laser ablation with ultrashort pulses. Investigations were performed on the materials 4HN-SiC and 6H-SiC to study material modifications by picosecond laser excitation at 355 nm and 266 nm. Confocal microscopy, scanning electron microscopy, and mass spectrometry were used to determine the ablation threshold fluence and ablation efficiency, study the morphology, and analyze the Si/C ratio changes in the laser-affected area. In summary, silicon carbide's unique properties present challenges in material processing. However, the use of picosecond lasers with Deep-UV wavelength can lead to improved processing results, enhancing its application possibilities in various high-tech fields.



11:45am - 12:00pm

Micro-Polishing of 4H-SiC Surfaces Using Femtosecond Laser Vector Beams and Wobble-Based Scanning

Chung-Wei Cheng1,2, Che Tseng1, Jia Fan Guo1,2

1National Yang Ming Chiao Tung University, Taiwan; 2Heterogeneously-integrated Silicon Photonic Integration Center, National Taiwan University of Science and Technology, No. 43, Section 4, Keelung Road, Taipei 106, Taiwan

The manufacturing process of 4H-SiC wafers involves slicing the wafers from an ingot using laser cutting, followed by polishing to achieve the required flatness. This study explores the feasibility of micro-polishing 4H-SiC surfaces using femtosecond laser vector beams in combination with wobble-based scanning. Initially, structures measuring tens of micrometers were fabricated using a high fluence of 1.39 J/cm², resulting in a surface roughness (Sz) of 32.3 μm, which replicates the surface morphology of 4H-SiC after laser slicing. Subsequently, a lower fluence of 1.25 J/cm² and defocus were employed to create a smoother surface morphology with a surface roughness (Sz) of 7.7 μm. This approach demonstrates that femtosecond laser vector beams combined with wobble-based scanning can effectively perform micro-ablation on SiC surfaces, highlighting its potential for 4H-SiC micro-polishing applications.



 
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