Conference Agenda

Session

S6: MEMS Sensors

Time:

Monday, 20/Apr/2026:

4:05pm - 5:25pm

Session Chair: Christine Schwarz, Noesis Solutions NV
Session Chair: Stoyan Stoyanov, University of Greenwich

Location: Cedar-Magnolia-Sycamore

Presentations

4:05pm - 4:25pm

Layout-oriented Design of MEMS Acceleration Sensor and Evaluation of Packaging Effects

Alexey Shaporin¹, Annett Krusch², Sebastian Weidlich², Petra Kuenzel¹, Christian Behl¹, Roman Forke¹, Karla Hiller², Susann Hahn², Danny Reuter²

¹FhI ENAS, Germany; ²TU Chemnitz, Germany

4:25pm - 4:45pm

Design Optimization of a Multi-resonant Folded Beam Piezoelectric Energy Harvester Using an Efficient Two-phase Topology Optimization

Siyang Hu^1,2, Dennis Hohlfeld¹, Tamara Bechtold^2,1

¹University of Rostock, Germany; ²Jade University of Applied Sciences, Germany

4:45pm - 5:05pm

Physics-based State-space Model for Self-sensing in Piezoelectric MEMS Microphones

Nikita Ovsiannikov¹, Til Friebe¹, Christian Bretthauer², Gabriele Schrag¹

¹Technical University of Munich, Germany; ²Infineon Technologies AG, Germany

5:05pm - 5:25pm

Lab-on-Chip Acoustic Detection Platform: Design, Fabrication and Performance Evaluation

Makrem BEN ABDELKADER^1,2,3, Hatem DAHMANI¹, Reda AITAYAD¹, Samuel DUPONT¹, Chérif DRIDI², Julien CARLIER¹

¹Univ. Polytechnique Hauts-de-France, France; ²NANOMISENE Laboratory, Tunisia; ³University of Sousse, Tunisia